平均压力 特征直径 | 1 MPa | 5 MPa | 10 MPa | 20 MPa | 30 MPa | 40 MPa |
10 nm | 0.59 | 0.12 | 0.059 | 0.029 | 0.020 | 0.015 |
20 nm | 0.29 | 0.059 | 0.029 | 0.015 | 0.0098 | 0.0073 |
30 nm | 0.20 | 0.039 | 0.020 | 0.0098 | 0.0065 | 0.0049 |
40 nm | 0.15 | 0.029 | 0.015 | 0.0073 | 0.0049 | 0.0037 |
50 nm | 0.12 | 0.023 | 0.012 | 0.0059 | 0.0039 | 0.0029 |
60 nm | 0.10 | 0.020 | 0.0098 | 0.0049 | 0.0033 | 0.0024 |
70 nm | 0.084 | 0.017 | 0.0084 | 0.0042 | 0.0028 | 0.0021 |
80 nm | 0.073 | 0.015 | 0.0073 | 0.0037 | 0.0024 | 0.0018 |
90 nm | 0.065 | 0.013 | 0.0065 | 0.0033 | 0.0022 | 0.0016 |
100 nm | 0.059 | 0.012 | 0.0059 | 0.0029 | 0.0020 | 0.0015 |